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Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array

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3 Author(s)
Haifei Bao ; Chinese Acad. of Sci., Shanghai ; Bin Liu ; Xinxin Li

Size and temperature effects of micro/nano friction between a tiny tip and a polymer film are investigated. This topic is important in MEMS/NEMS such as high-density thermal-mechanical data storage on polymethylmethacrylate (PMMA) film. In present research, three electric-thermal probe-tips with varied apex dimensions are on-chip integrated to study the micro/nano friction and structural properties, which are remained as unsolved problems in MEMS/NEMS. Present experiments directly reveal significant size and temperature effects on micro/nano friction, adhesion and the structural transitions of PMMA thin film.

Published in:
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference: 10-14 June 2007

Page(s):
299 - 302
E-ISBN :
1-4244-0842-3
Print ISBN:
1-4244-0842-3
INSPEC Accession Number:
9828476
Conference Location :
Lyon
Digital Object Identifier :
10.1109/SENSOR.2007.4300128
Product Type:
Conference Publications

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