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3D Silicon Betavoltaics Microfabricated using a Self-Aligned Process for 5 Milliwatt/CC Average, 5 Year Lifetime Microbatteries

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3 Author(s)
Duggirala, Rajesh ; Cornell Univ., Ithaca ; Tin, S. ; Lal, A.

We report on the first demonstration of high efficiency 3D silicon betavoltaics, microtextured with deep reactive ion etched (DRIE) trenches, for potential application in 5 year lifetime 5 mW / cc Promethium -147 powered microbatteries. Prototype 3D silicon betavoltaics were designed and microfabricated in a 2-mask self-aligned process, and characterized using accelerated electron beams in a scanning electron microscope to yield 1.02 % conversion efficiency @ 30 kV acceleration voltage.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007

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