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Micro Heater with PT-CR Thin Film Thermo-Couple for High Speed Biological Measurements

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5 Author(s)

We present a thermal microdevice for high-speed biological measurements that combines a heater for fast temperature shifting (ms range) and a platinum/chromium thin film thermocouple (TFTC) for accurate temperature detection. The device, manufactured on quartz wafer, is successfully employed to measure the time required for unzipping of double strand DNA demonstrating its large capabilities.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Date of Conference:

10-14 June 2007