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Application of the digital holographic interference microscope for thin films investigation

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6 Author(s)
Tishko, D.N. ; Karazin V.N. Kharkov Nat. Univ., Kharkov ; Tishko, T.V. ; Titar, V.P. ; Zadneprovskiy, Yu.A.
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We used the digital holographic interference microscope (DHIM) for thin films investigation. Three-dimensional (3-D) image of A1N thin film deposited on an acryl substrate by vacuum-arc method .and the results of the film thickness measurement are presented. It has been shown that the DHIM can be successfully used for film surface quality control, thickness and film damages parameters measurement.

Published in:

Optoelectronic Physics and Technology, 2007. OPT '07. International Workshop on

Date of Conference:

20-22 June 2007