By Topic

Deposition of Tungsten Films in Penning's Arc Dischardge

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Shandra, Z. ; Dept. of Electron. Devices, Lviv Polytech. Nat. Univ., Lviv ; Troyan, P. ; Belyuk, S.

Results of investigation of Penning's discharge with a probe inserted into the centre of the discharge gap through the anode hole are described. It is found that the discharge current decreases and the probe becomes heated if its potential is negative up to 1 kV. If the discharge current exceeds 80 mA and the potential of the probe is of 1.15 kV for tungsten or molybden probes, the discharge becomes of arc mode. It is found that there exist minimal values of discharge and probe currents necessary for sustaiining arc mode. Results of the experiments are accounted for by the emergence of thermoemission of the probe. It is shown that intensive sputtering of the probe in arc discharge enables us to increase the rate of deposition of tungsten films by an order as compared to glow charge.

Published in:

CAD Systems in Microelectronics, 2007. CADSM '07. 9th International Conference - The Experience of Designing and Applications of

Date of Conference:

19-24 Feb. 2007