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Progress in Large Integration Scale Circuits in SiON Technology

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7 Author(s)
Melloni, A. ; Politecnico di Milano, Milano ; Morichetti, F. ; Cusmai, G. ; Costa, R.
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In this contribution the potentialities and the limitation of the silicon oxynitride (SiON) technology are reviewed and a number of integrated optical circuits and devices are presented. Mach-Zehnder, ring resonators, variable bandwidth filters, ring resonators based cross-bar matrices and a DQPSK receiver with interleaver and variable attenuators have been realized, characterized and tested in a 10 Gbit/s WDM system.

Published in:

Transparent Optical Networks, 2007. ICTON '07. 9th International Conference on  (Volume:1 )

Date of Conference:

1-5 July 2007