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Realization of a Novel Region Creation in Web-based Mask Design Platform

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4 Author(s)
Mingcong Fan ; Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, 230026, P.R.China ; Lianguan Shen ; Xiaodong Wang Mujun Li ; Jinjin Zheng

A novel region profile construction method for mask pattern design is proposed. The algorithm is realized in our own developed web-based mask design platform. Comparing with traditional region creation approach, the area-oriented region creation algorithm is more intelligent, convenient and flexible for designer's operation. The design result can be shared and operated cooperatively online.

Published in:

2007 International Conference on Information Acquisition

Date of Conference:

8-11 July 2007