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Realization of a Novel Region Creation in Web-based Mask Design Platform

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5 Author(s)
Mingcong Fan ; China Univ. of Sci. & Technol., Hefei ; Lianguan Shen ; Xiaodong Wang ; Mujun Li
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A novel region profile construction method for mask pattern design is proposed. The algorithm is realized in our own developed web-based mask design platform. Comparing with traditional region creation approach, the area-oriented region creation algorithm is more intelligent, convenient and flexible for designer's operation. The design result can be shared and operated cooperatively online.

Published in:

Information Acquisition, 2007. ICIA '07. International Conference on

Date of Conference:

8-11 July 2007