Dual-material-gate (DMG) insulated shallow extension gate-stack MOSFET involving dielectric pocket (DP) and DMG assimilation onto the conventional MOSFET has been studied. Simulations reveal a reduction in substrate leakage current, linearity improvement, enhancement in - gm/IDS, early voltage (VEA), and gm/gd, down to 50-nm gate length as an outcome of this DP and DMG integration.
Published in:
Electron Devices, IEEE Transactions on
(Volume:54
,
Issue:
9
)
Date of Publication: Sept. 2007