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In this paper, an integrator-backstepping-based dynamic surface control method for a two-axis piezoelectric micropositioning stage is proposed. First, according to the dynamics of motion of a mechanical mass-spring system, mathematical equations that contain a linear viscous friction, a varied elasticity with cross-coupling effect due to mechanical bending, and dynamics of a hysteresis variable is proposed to describe the motion dynamics of the two-axis piezopositioning stage. Next, from the equations, a state-space model in which the applied voltage to the stage is defined as an output of an integrator is derived. On the basis of this state-space model, the integrator-backstepping-based dynamic surface control is proposed. By using the proposed control method to trajectory tracking of the two-axis piezopositioning stage, the dynamic performance, robustness to parameter variations, and trajectory tracking error can be improved. Experimental results of the time responses from the computer-controlled two-axis piezopositioning stage illustrate the validity of the proposed control method for practical applications in trajectory tracking.
Date of Publication: Sept. 2007