Referenced Items are not available for this document.
Early detection of faulty process steps through process diagnosis is critical to the semiconductor industry. The AC-ID methodology can isolate the root causes of yield loss by combining end-of-line tests with process history information. The ACID software tool automates this methodology and is fully operational at several industry production sites.
Published in:
Design & Test of Computers, IEEE
(Volume:24
,
Issue:
4
)
Date of Publication: July-Aug. 2007
- Page(s):
- 352 - 361
- ISSN :
- 0740-7475
- INSPEC Accession Number:
- 9616536
- Digital Object Identifier :
- 10.1109/MDT.2007.119
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 27 August 2007
- Issue Date :
- July-Aug. 2007
- Sponsored by :
- IEEE Council on Electronic Design and Automation
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