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ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis

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4 Author(s)

Early detection of faulty process steps through process diagnosis is critical to the semiconductor industry. The AC-ID methodology can isolate the root causes of yield loss by combining end-of-line tests with process history information. The ACID software tool automates this methodology and is fully operational at several industry production sites.

Published in:

Design & Test of Computers, IEEE  (Volume:24 ,  Issue: 4 )