By Topic

Total Dose Response of Ge MOS Capacitors With HfO2/Dy 2O3 Gate Stacks

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)

We report the results of total ionizing dose radiation tests on germanium-substrate MOS capacitors with HfO2/Dy2O3 gate dielectrics with effective oxide thicknesses of ~1.9 and 1.1 nm. There are significant densities of border traps before irradiation, and no measurable changes in device response after 10 Mrad(SiO2) exposure. We attribute the lack of net oxide charge trapping to equal electron and hole trapping and/or charge neutralization via gate leakage current. The introduction of Dy2O3 evidently leads to reduced charge trapping in these HfO2/Dy2O3 dielectrics relative to devices with only HfO2.

Published in:

Nuclear Science, IEEE Transactions on  (Volume:54 ,  Issue: 4 )