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Scaling Non-Volatile Memory Below 30nm

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1 Author(s)
Prall, K. ; Micron Technol. Inc., Boise

The future scaling challenges of non-volatile memories for 32 Gb+ using 30 nm and below feature sizes are discussed. The key challenges reviewed include structural integrity, floating gate scaling, floating gate replacement, noise and variation. Future trends are discussed.

Published in:

Non-Volatile Semiconductor Memory Workshop, 2007 22nd IEEE

Date of Conference:

26-30 Aug. 2007