Referenced Items are not available for this document.
A micromachined tunable capacitor is presented with the variable capacitor electrically isolated from the electrostatic actuator for flexible circuit application. Fabricated in low-resisitivity silicon wafer with CMOS-compatible processes, the device exhibits a large tuning range of 218% under 4 V driving, as well as a high Q-factor of 115 at 1 GHz and a high self-resonance frequency of 9.5 GHz.
Published in:
Electronics Letters
(Volume:43
,
Issue:
15
)
Date of Publication: July 19 2007
- Page(s):
- 808 - 809
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 9944585
- Digital Object Identifier :
- 10.1049/el:20071423
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 23 July 2007
- Issue Date :
- July 19 2007
- Sponsored by :
- Institution of Engineering and Technology
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