Referenced Items are not available for this document.
In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.
Published in:
Applied Superconductivity, IEEE Transactions on
(Volume:17
,
Issue:
2
)
Date of Publication: June 2007
- Page(s):
- 3773 - 3776
- ISSN :
- 1051-8223
- INSPEC Accession Number:
- 9606326
- Digital Object Identifier :
- 10.1109/TASC.2007.899041
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 23 July 2007
- Issue Date :
- June 2007
- Sponsored by :
- The IEEE Council on Superconductivity
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