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Fabrication and Application of Two-Axis Hall Sensor Array Using ELO Film Bonding Technology

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3 Author(s)
Koh, K. ; Kanagawa Inst. of Technol., Atsugi ; Seok Beom Kim ; Hohkawa, K.

In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

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Applied Superconductivity, IEEE Transactions on  (Volume:17 ,  Issue: 2 )