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Browse Journals & Magazines > Electron Devices, IEEE Transa ...> Volume:54 Issue:8 Help

Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic-Wave Resonators—Part II: Measurement and Characterization

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3 Author(s)
Pourkamali, S. ; University of Denver, Denver ; Ho, G.K. ; Ayazi, F.

In this part of the paper, extensive measurement results on the resonance, frequency tuning, and temperature characteristics of the silicon bulk acoustic-wave resonators (SiBARs) that were described in Part I will be presented and justified. Bulk acoustic wave resonators, high-aspect- ratio polysilicon and single-crystal silicon (HARPSS), MEMS, micromachining, micromechanical resonators, silicon resonators.

Published in:
Electron Devices, IEEE Transactions on  (Volume:54 ,  Issue: 8 )

Date of Publication: Aug. 2007

Page(s):
2024 - 2030
ISSN :
0018-9383
INSPEC Accession Number:
9618604
Digital Object Identifier :
10.1109/TED.2007.901405
Product Type:
Journals & Magazines
Date of Current Version :
23 July 2007
Issue Date :
Aug. 2007
Sponsored by :
IEEE Electron Devices Society

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