Cart (Loading....) | Create Account
Close category search window
 

Parametric Testing of HYPRES Superconducting Integrated Circuit Fabrication Processes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

A set of diagnostic chips for process control and design parameters evaluation has been developed for HYPRES' 1.0 kA/cm2, 4.5 kA/cm2, and 20 kA/cm2 fabrication processes, consisting of four 5times5-mm chips. Testing was performed on automated test setup (OCTOPUX) that automatically logs results and maintains records of fabrication process and design parameters. The design of diagnostic structures and automated testing algorithms are discussed. Statistical data are presented on the uniformity and run-to-run variation of the critical currents, critical current density, junction size, inductances, and other fabrication and design parameters collected since September 2005. The influence of the fabrication parameters deviation on operational margins and yield of large superconducting digital integrated circuits is discussed, as well as requirements for the 20 kA/cm2 (80 GHz) process.

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:17 ,  Issue: 2 )

Date of Publication:

June 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.