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A 10-kA/cm2 Nb/AlOchi/Nb junction technology for rapid single flux quantum (RSFQ) integrated circuits has been developed. Modifying our standard 1.6-kA/cm2 cell library, we have implemented elementary cells used to build RSFQ digital-to-analog converters for ac voltage standard applications. The 10-kA/cm2 library cells have been fabricated by utilizing existing process tools. Correct operations of the circuits have been confirmed at low speed. The maximum operating frequencies evaluated by an average-voltage measurement technique were consistent with the scaling rules of RSFQ circuits.