Cart (Loading....) | Create Account
Close category search window
 

A Resonant Micromachined Magnetic Field Sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Bahreyni, Behraad ; Univ. of Cambridge, Cambridge ; Shafai, C.

The design, modeling, and simulation of a novel micromachined magnetic field sensor are discussed. The sensor uses an electrostatic resonator whose fundamental resonant frequency is modified by a Lorentz force generated from the interaction of the sensor structure and the present magnetic field. The sensor was fabricated in a standard bulk micromachining process without the need for any additional processing steps. Since the sensor does not employ any magnetic materials, it does not exhibit hysteresis. A comprehensive model of the sensor behavior is derived which encompasses the interactions of the involved physical domains. Validity of the modeling results was verified by finite-element simulations, and later, through experiments. The sensitivities of the fabricated sensors are in the range of 48-87 Hz/T, depending on sensor structure and dimensions. The design of the sensor allows for its fabrication in many standard microelectromechanical system processes and is compatible with CMOS processes. The theoretical minimum detectable signal with current devices is on the order of 217 nT. Methods to improve the sensitivity of the current sensors are suggested. A linear response to a wide range of magnetic fields makes this design suitable for applications where large fields need to be measured with high resolution.

Published in:

Sensors Journal, IEEE  (Volume:7 ,  Issue: 9 )

Date of Publication:

Sept. 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.