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The analysis and precise calculation of reflection and scattering of Rayleigh wave by electrodes is important for surface acoustic wave (SAW) device models, especially for SAW identification (ID) tag design. We present a source regeneration method, which utilizes Green's function combined with finite-element method (FEM)/boundary-element method (BEM) to obtain accurate values of reflection, transmission, and scattering coefficients in a direct way. We take one electrode as the reflector on 128deg YX-LiNbO3 substrate to show the result as an example. The results are very accurate and are obtained with short computing time. The new analysis way shows its powerful ability for other advanced discussion of SAW devices.