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A Novel Coilless Scanning Mirror Using Eddy Current Lorentz Force and Magnetostatic Force

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4 Author(s)
Hsueh-An Yang ; Nat. Tsing Hua Univ., Hsinchu ; Tsung-Lin Tang ; Sheng Ta Lee ; Weileun Fang

This paper reports on novel coilless microscanning mirrors driven by the magnetostatic force that resulted from a magnetic interaction as well as the Lorentz force that is induced by an eddy current. This eliminates complicated coil routing and insulation layer deposition and simplifies fabrication allowing easy integration with micromachining and complementary metal-oxide-semiconductor processes. Bulk micromachined one-axis and two-axis scanning mirrors are demonstrated, displaying 1-D and 2-D scanning patterns. Two-dimensional scanning patterns are easily tuned by varying the combination of driving frequencies. The results show that the diamagnetic (Cu) mirror is mainly driven by the eddy-current-induced Lorentz force, whereas the ferromagnetic (Ni) mirror is mainly driven by the magnetostatic force.

Published in:

Journal of Microelectromechanical Systems  (Volume:16 ,  Issue: 3 )