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A Low-Power-Consumption Out-of-Plane Electrothermal Actuator

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6 Author(s)
Girbau, D. ; Univ. Politecnica de Catalunya, Barcelona ; Llamas, M.A. ; Casals-Terre, J. ; Simo-Selvas, X.
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This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically.

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Microelectromechanical Systems, Journal of  (Volume:16 ,  Issue: 3 )