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An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System

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4 Author(s)
Huai Zhang ; Shanghai Jiao Tong Univ., Shanghai ; Zhibin Jiang ; Chengtao Guo ; Huiran Liu

Real-time scheduling of semiconductor wafer fabrication system (SWFS) is complicated due to the following factors: re-entrant product flow, high uncertainties in operations and rapidly changing products and technologies. This paper presents a simulation platform for real-time scheduling of SWFS, which is designed and developed based on extended object-oriented petri net (EOPN) to describe the complicated wafer fabrication process and serve as the foundation of realtime scheduling. In addition, a dynamic bottleneck dispacthing (DBD) algorithm is designed to detect bottlenecks in a timely way and make adaptive dispatching decisions according to the real-time conditions. The results of the simulation experiments and analysis show that the DBD algorithm is superior to CR+FIFO and EDD methods.

Published in:

Systems, Man and Cybernetics, 2006. SMC '06. IEEE International Conference on  (Volume:4 )

Date of Conference:

8-11 Oct. 2006

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