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Nanoinjection Lithography for Submicrometer Electrodes on Polymer Substrates

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4 Author(s)
Rust, M.J. ; Cincinnati Univ., Cincinnati ; Jaephil Do ; Se Hwan Lee ; Ahn, Chong H.

In this paper, a high-throughput method for fabricating submicrometer electrodes on polymer substrates is introduced and results are presented. This new process, known as nanoinjection lithography, combines nanoinjection molding with trench-filling techniques to create submicrometer electrodes on thermoplastic polymers. The fabrication method and resulting electrodes are characterized in this work using scanning electron microscopy, surface profilometry, and atomic force microscopy. The ability to fabricate submicrometer electrodes on polymer chips in a high-throughput process may allow the mass-production of ultrasensitive biosensors for point-of-care medical devices.

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Nanotechnology, IEEE Transactions on  (Volume:6 ,  Issue: 4 )