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The carbon nanotube (CNT) bundle is a promising candidate for next-generation interconnect/via applications. A realistic CNT bundle is a mixture of single-wall and multi-wall CNTs and its performance analysis needs to consider both kinds of CNTs. The inductances of the mixed CNT bundles are estimated, which are in agreement with the recent experimental results. Impacts of different parameters such as tube density, tube distribution, metallic tube ratio and bundle dimensions are discussed, providing an important guideline to design and fabricate a CNT bundle with a desirable inductance performance.
Date of Publication: June 2007