Cart (Loading....) | Create Account
Close category search window

SIMS Analysis of Gate Oxide Breakdown Due to Tungsten Contamination

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Gui, D ; Chartered Semicond. Mfg Ltd., Singapore ; Xing, Z.X. ; Mo, Z.Q. ; Hua, Y.N.
more authors

The gate oxide is the most fragile element of metal-oxide-semiconductor (MOS) transistor. Metallic contamination in the gate oxide leads to high leak current and even gate oxide breakdown. In this paper, we have investigated a failure case of NMOS gate oxide breakdown using secondary ion mass spectrometry (SIMS) because of its excellent sensitivity. The SIMS depth profiles at the test pad in the scribe line showed that the gate oxide breakdown was caused by tungsten (W) contamination. Further study indicated that W contaminated wafers during n-poly implantation by the re-deposition from the supporting disk of implanter. Based on the SIMS results, measures have been suggested to reduce the W contamination.

Published in:

Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on

Date of Conference:

Oct. 29 2006-Dec. 1 2006

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.