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A 0.3mm2 Miniaturized X-Band On-Chip Slot Antenna in 0.13μm CMOS

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5 Author(s)

An on-chip miniaturized slot antenna integrated with a CMOS LNA, on the same chip, is presented in this paper. The antenna operates in the 9-10 GHz frequency band, occupies a die area of only 0.3 mm2, and is fabricated in a standard 0.13 mum RF CMOS process. A LNA implemented on the same substrate is directly matched to the antenna. An efficient shielding technique is used to shield the antenna from the low-resistivity substrate underneath it. Measurement results of the fabricated prototype indicate that the antenna shows an active gain of -4.4 dBi and an efficiency of 9% in spite of its close proximity to the lossy silicon substrate.

Published in:

Radio Frequency Integrated Circuits (RFIC) Symposium, 2007 IEEE

Date of Conference:

3-5 June 2007

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