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High-frequency acousto-optic deflector using ZnO thin films deposited on an amorphous substrate

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3 Author(s)
J. Chang ; Furukawa Electric Co. Ltd., Yokohama R&D Laboratories, Yokohama, Japan ; N. Harada ; S. Kashiwa

c-axis-oriented ZnO thin films were deposited on Corning 7059 glasses by RF magnetron sputtering. 230 MHz-bandwidth acousto-optic deflector was achieved by using this ZnO film. The propagation loss of the surface-acoustic wave in ZnO films was about 20dB/cm at the acoustic frequency of 630 MHz.

Published in:

Electronics Letters  (Volume:23 ,  Issue: 25 )