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Optically excited resonant diaphragm pressure sensor

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4 Author(s)
Uttamchandani, D. ; University of Strathclyde, Department of Electronic & Electrical Engineering, Glasgow, UK ; Thornton, K.E.B. ; Nixon, J. ; Culshaw, B.

Silicon diaphragms fabricated by anisotropic etching are coated with a thin layer of aluminium. An intensitymodulated laser beam focused on the diphragm generates transverse vibrations which are detected interferometrically. Differential pressure is applied to the diaphragm and the pressure-induced change in the fundamental resonant frequency is reported.

Published in:

Electronics Letters  (Volume:23 ,  Issue: 4 )