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Temperature dependence of resonant frequency in optically excited diaphragms

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3 Author(s)
Thornton, K.E.B. ; University of Strathclyde, Department of Electronic & Electrical Engineering, Glasgow, UK ; Uttamchandani, D. ; Culshaw, B.

Silicon diaphragms of 4 ¿m thickness, fabricated by anisotropic etching techniques, are coated with a thin layer of aluminium. An intensity-modulated laser beam focused on the diaphragm generates transverse vibrations which are detected interferometrically. The measured deflections, resonant frequencies and temperature dependence of resonant frequencies are reported.

Published in:

Electronics Letters  (Volume:22 ,  Issue: 23 )