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New fabrication technique for integrated-optical taper with controllable profile by selective liquid-phase epitaxy of GaAs

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3 Author(s)
Sang Bae Kim ; Korea Advanced Institute of Science & Technology, Department of Electrical Engineering, Seoul, Korea ; Kee Young Kwon ; Young Se Kwon

A new fabrication technique for integrated-optical tapers with controllable profiles on a GaAs substrate by selective liquid-phase epitaxy is proposed based on two-dimensional numerical results, and preliminary experimental results are given. This technique takes advantage of the dependence of the epitaxial layer thickness on the window width.

Published in:

Electronics Letters  (Volume:22 ,  Issue: 15 )