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Implantable MEMS Accelerometer Microphone for Cochlear Prosthesis

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5 Author(s)
Young, D.J. ; Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH ; Zurcher, M.A. ; Ko, W.H. ; Semaan, M.
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A MEMS accelerometer is proposed as an implantable middle ear microphone for future fully implantable cochlear prosthesis. Vibration characterization of human temporal bones by using laser Doppler vibrometer indicates that a MEMS accelerometer needs to achieve a sensing resolution of 75 mug/radicHz with a bandwidth of 10 kHz to detect normal conversation. A prototype MEMS accelerometer is designed and fabricated. When interfaced with a low noise CMOS capacitance-to-voltage converter, the sensor achieves a sensing resolution of 78 mug/radicHz at 500 Hz with a sensitivity of 11.5 mV/g and bandwidth of 6.4 kHz. The overall system attached on umbo demonstrates the capability of detecting normal conversation.

Published in:

Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on

Date of Conference:

27-30 May 2007