Skip to Main Content
We will present the design and implementation of monolithic and hybrid sensors using integrated circuits, particularly in CMOS. We will begin by providing the definitions and performance metrics of sensors and a brief overview of various noise processes. Subsequently, we will discuss the advantages and shortcomings of sensors built in silicon-based fabrication processes and examine, in detail, their integrated circuit topologies. Next, we will provide a comprehensive study of the design and analysis of CMOS integrated image sensors, integrated biosensors, and electronic backbone of MEMS hybrid sensors. Topics include: silicon photodetectors; CCD and CMOS sensor architectures and circuits; Affinity-based detection and biochemical transduction; optical, electrochemical, and mechanical transducer design; integrated microarrays, biochips, and sensor SoCs. We will conclude with a survey of advanced research topics in the area of integrated sensors such as smart sensors, RF-IDs, and nanosensors.