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Suitable materials forming the core of microscale magnetic components have been characterized for the application of magnetic passive components in the 0.5-10 MHz frequency range. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Inductance values ranging from 0.3 to 120 H with component power efficiency above 90% have been measured. Although the present inductor, at 500 kHz, achieves 77% power efficiency for 24.7W/cm3 power density, an optimized process predicts a power efficiency of 97% for 30.83 W/cm3 power density.