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Automated Hall effect profiler for electrical characterisation of semiconductors

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2 Author(s)
Young, N.D. ; Philips Research Laboratories, Redhill, UK ; Hight, M.J.

An automated system for the profiling of impurity distributions in doped semiconductor layers is presented. The instrument utilises the differential Hall effect technique, combining electrical measurement with thin layer removal. An example profile is given to demonstrate the capability of the instrument.

Published in:

Electronics Letters  (Volume:21 ,  Issue: 22 )

Date of Publication:

October 24 1985

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