MBE growth of GaAs on (100) silicon has been achieved at low substrate temperatures with and without an initial desorption of the silicon surface. An arsenic overpressure (5 à 10 ¿8 torr) is necessary for epitaxial growth. The films grown were intrinsic and were twinned in the [110] direction.
Published in:
Electronics Letters
(Volume:21
,
Issue:
9
)
Date of Publication: April 25 1985