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Reactive ion etched GaAs optical waveguide modulators with low loss and high speed

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4 Author(s)
Buchmann, P. ; Swiss Federal Institute of Technology, Zurich, Switzerland ; Kaufmann, H. ; Melchior, H. ; Guekos, G.

Single-mode rib waveguides and modulators for operation at 1.3 ¿m have been fabricated by reactive ion etching (RIE). The antireflection-coated devices show very low coupling and propagation loss (2 dB/cm) and are suitable as extracavity digital modulators in the Gbit/s range for single-mode system applications.

Published in:

Electronics Letters  (Volume:20 ,  Issue: 7 )