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Fabrication of ultra-thin free-standing wires of silicon nitride

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4 Author(s)
Lee, K.L. ; University of Cambridge, Department of Engineering, Cambridge, UK ; Ahmed, H. ; Kelly, M.J. ; Wybourne, M.N.

We describe the fabrication of free-standing wires of amorphous silicon nitride of approximate dimensions 125 × 0.15 × 0.1 ¿m, which are important initial test structures for examining quantum deviations from Ohm's law and Joule's law predicted to occur in fine geometry samples.

Published in:

Electronics Letters  (Volume:20 ,  Issue: 7 )

Date of Publication:

March 29 1984

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