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Design, Fabrication and Assembly of an Optical Biosensor Probe Package for OCT (Optical Coherence Tomography) Application

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8 Author(s)
C. S. Premachandran ; Institute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685 ; Kelvin Chen Wei Sheng ; Janak Singh ; Jason Teo
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A miniaturized optical bioprobe package is developed using a 3D micro mirror and is tested for bio-imaging application. A silicon optical bench is designed and micro machined to assemble the fiber, lens and the 3D micro mirror device. A 45 degree angle trench is used to place the micro mirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micro mirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micro mirror. The bio probe is packaged and is tested in a Time domain OCT (optical coherence tomography) setup and optical image is obtained for plant tissue.

Published in:

2007 Proceedings 57th Electronic Components and Technology Conference

Date of Conference:

May 29 2007-June 1 2007