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Challenges of Thin Core Substrate Flip Chip Package on Advanced Si Nodes

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6 Author(s)
Chiu, C. ; Taiwan Semicond. Manuf. Co., Hsinchu ; Chang, K.C. ; Jones Wang ; Lee, C.H.
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Advanced silicon node is becoming the mainstream technology used for electronic product and flip chip package is one of the assembly solutions to meet of high-end products requirement. For flip-chip assembly application, reducing the core thickness of substrate to derive higher electrical performance and routing density has been approached. Combining with lower mechanical strength characteristics of low-k dielectric material, the management of thin-core substrate warpage and the stress to low-k dielectric has become the challenges to manufacture a robust and reliable advanced flip-chip product. In this paper, mechanical saw optimization and pre-solder height control on C4 pad of substrate have been evaluated. The warpage change at each major process step of flip-chip assembly process has been measured. Through the numerical analysis, all the critical factors are analyzed to understand their effect [1], and pre-conditioning followed by temperature cycling test proves the optimized design. The experiment results showed the underfill and die thickness have significant impact to package warpage and stress to low-k, which is matched with simulation predictions. To 400 um thin-core substrate, 787 um (31 mil) silicon die combining lower Tg (<80degC/TMA) underfill could perform better package warpage and competitive stress level.

Published in:

Electronic Components and Technology Conference, 2007. ECTC '07. Proceedings. 57th

Date of Conference:

May 29 2007-June 1 2007