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New method for determining distribution of interface states in an MIS system

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2 Author(s)
Yamaguchi, E. ; NTT, Musashino Electrical Communication Laboratory, Musashino, Japan ; Kobayashi, T.

A general formula for the capacitance transient response in an MIS system was developed in order to apply the ICTS (isothermal capacitance transient spectroscopy) technique to an MIS diode. A new spectroscopic measurement method for determining the distribution of interface states is proposed and applied to an InAs MIS diode.

Published in:

Electronics Letters  (Volume:18 ,  Issue: 7 )