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New diffraction grating profiles in InP for DFB lasers and integrated optics

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3 Author(s)
L. D. Westbrook ; British Telecom Research Laboratories, Ipswich, UK ; A. W. Nelson ; P. J. Fiddyment

A bilevel processing technique has been used to obtain sub-micrometer-period InP diffraction gratings. Novel cross-sectional grating profiles with depths of up to 4000 Å have been obtained which should facilitate the fabrication of more efficient Bragg devices.

Published in:

Electronics Letters  (Volume:19 ,  Issue: 25 )