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Carrier lifetimes in silicon epitaxial layers deposited on oxygen-implanted substrates

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3 Author(s)
Das, K. ; Middlesex Polytechnic, Microelectronics Centre, London, UK ; Shorthouse, G.P. ; Butcher, J.B.

Carrier lifetimes in silicon epitaxial layers deposited on high-dose oxygen-implanted wafers have been obtained from measurements of diode storage times. A figure of 1.25 ¿S was obtained for diodes in the implanted area, compared with 1.75 ¿S for diodes outside the implanted area on the same wafer. This marginal degradation of lifetime indicates that the dielectrically isolated structure should be able to support bipolar and dynamic logic devices.

Published in:

Electronics Letters  (Volume:19 ,  Issue: 4 )