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High-quality InP surface corrugations for 1.55 ¿m InGaAsP DFB lasers fabricated using electron-beam lithography

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3 Author(s)
Westbrook, L.D. ; British Telecom Research Laboratories, Ipswich, UK ; Nelson, A.W. ; Dix, C.

Second-order surface corrugations for 1.55 ¿m distributed feedback (DFB) lasers have been fabricated in InP with a high yield using electron beam exposed resist masks. Attractive features of this technique are its flexibility and variable mark/space ratio (for optimum DFB coupling strength). Diffraction experiments show these gratings to be of suitably high optical quality.

Published in:

Electronics Letters  (Volume:18 ,  Issue: 20 )