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Cylindrical concave diffraction grating utilising thin silicon chip

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2 Author(s)
Fujii, Y. ; NTT Yokosuka Electrical Communication Laboratory, Yokosuka, Japan ; Minowa, J.

A unique manufacturing method for concave diffraction gratings is proposed. Also, a cylindrical concave diffraction grating was manufactured with a multimode slab waveguide. A silicon plane diffraction grating was bent cylindrically in this method. The efficiency of the concave diffraction grating was 82% at a 1.3 ¿m wavelength. The efficiency was about the same as that of the plane diffraction grating.

Published in:

Electronics Letters  (Volume:17 ,  Issue: 24 )