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Optical frequency spectra of directly frequency modulated AlGaAs semiconductor laser in the 0Â¿5.2 GHz range were measured by using a Fabry-Perot interferometer and a birefringent optical filter. The frequency deviation is linearly proportional to the RF modulation current. The measured modulation frequency characteristics for the frequency deviation show that the thermal effect is predominant in the frequency below 10 MHz. It has a resonance peak which behaves just like the peak observed in the modulation. Experimental results agreed well with theoretical values calculated by considering thermal effect and carrier-dependent refractive index variation.