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Microrobot System for Automatic Nanohandling Inside a Scanning Electron Microscope

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5 Author(s)
Fatikow, S. ; Univ. of Oldenburg, Oldenburg ; Wich, T. ; Hulsen, H. ; Sievers, T.
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In this paper, current research work on the development of an automated nano handling station in a scanning electron microscope (SEM) is presented. An experimental setup is described, in which two mobile microrobots cooperate in the vacuum chamber of an SEM. The robots are positioned by a closed-loop controller with sensor data, which is provided by three charge-coupled device cameras and the SEM. Continuous pose estimation is carried out by processing noisy SEM images in real time. To enable the automation of complex tasks, a client-server control system that can integrate various microrobots and sensors is introduced. Finally, the overall system is evaluated by automatic handling of transmission electron microscope lamellae.

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:12 ,  Issue: 3 )