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An on-chip digital characterization method for local random variation in a process is presented. The method uses a sense-amplifier-based test circuit that uses digital voltage measurement instead of the analog current measurements of conventional techniques. The proposed circuit helps design fast on-chip built-in-self-test schemes for measuring random variation. A testchip is designed in 0.13mum CMOS and measured to show the effectiveness of the proposed circuit in extracting local random variation.