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Variation of the admittance of a plasma capacitor with the amplitude of the measuring potential

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1 Author(s)
Freeston, I.L. ; University of Sheffield, Department of Electronic & Electrical Engineering, Sheffield, UK

The measured admittance is unaffected up to a measuring r.f. potential of r.m.s. value five times the equivalent electron temperature, except in a frequency range in which the admittance is affected by a potential exceeding half the electron temperature. This range is also that of the resonance probe, but it is concluded that any connection between the two effects is indirect.

Published in:

Electronics Letters  (Volume:6 ,  Issue: 21 )